Microlithography: Science and Technology

Microlithography: Science and Technology Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices. Wydawnictwo: Taylor & Francis Rok wydania: 2024 Okładka: miękka Liczba stron: 850 Wymiary: 25.6 x 18.1 x 4.6 cm Ilustracje: 570 Illustrations, black and white Język: angielski ISBN: 9781032836737