Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets. Autor: Maria Angela Pampillon Arce Wydawnictwo: Springer Rok wydania: 2018 Okładka: miękka Liczba stron: 164 Wymiary: 23.5 x 15.5 cm Ilustracje: 6 Illustrations, color; 110 Illustrations, black and white Język: angielski ISBN: 9783319882840