Laser Heat-Mode Lithography: Principle and Methods

Laser Heat-Mode Lithography: Principle and Methods This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. Autor: Jingsong Wei Wydawnictwo: Springer Rok wydania: 2019 Okładka: twarda Liczba stron: 208 Wymiary: 23.5 x 15.5 cm Ilustracje: 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160 illus. in color. Język: angielski ISBN: 9789811509421